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| Metrology & Inspection Hitachi S-5000H SEM
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Metrology & Inspection > Hitachi S-5000H SEM
Manufacturer:Hitachi
Condition:Used,we sell it at AS IS(Refurbished and Installation are optional)
Price:Best Offer
Amount: 2 sets
Attribute Description
Equipment Manufacturer (OEM) Hitachi
Tool Model S5000H
Tool Description Scanning Electron Microscope (SEM)
Date of Manufacture Early 1990???s
Entity Code / CEID (if applicable) SEM02
Sample type (wafer, solid, gas, liquid) Wafer/Solids
Sample dimensions 4x6mm max ??C x-section or flat down
Vendor Serial # 6920-02
Operating System and Software Version Non PC based
Location SC9-135 Electron Microscopy Lab
Operational Status (fully functional, repairs needed, any cannibalization) Fully Operational
Electrical Power Configuration (voltage, phase, current) 208V, single phase, 35A stepped down through transformer to 100V
Benchtop or standalone? Stand alone
Sample Loading Configuration (load-lock, robot, liquid sample introduction system, etc.) Manual load-lock, single sample load
Short Paragraph describing this tool, include key features, equipment options, configuration, diagrams etc.:
Ultra-high resolution scanning electron microscope (UHRSEM) ??C cold cathode field emission (CCFESEM)
Resolution Spec for Secondary Electron imaging (SE) ??C 0.6nm @ 30kev and 2.0nm @ 1keV
Immersion lens system with high performance TEM sample stage
Fully dry pumped vacuum system: Seiko Mag Lev Turbo, Ion Pums x 3, Scroll pumps x 2
Digital image capture system, also includes high resolution photo CRT with camera
Space and Facilities Requirements
Module or Component Dimensions (Length x width x depth; add height, if tall tool) Utilities (electrical power configuration:voltage, phase, current; CDA, N2, gases, PCW, UPW, liquid nitrogen, etc.)
Main Console combined with vacuum station/electron column 80??? wide, 41??? depth
Column height 70??? 208V single phase, 35A stepped down to 100V
CDA @ 60PSI for pneumatics
N2 @ 10 PSI for purge
LN2 for anti-contamination cold finger |
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